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    DUAL CONTAINMENT TUBE
  • Features
  • · 不同液体采用不同颜色施工,危险要素最少化 & 可视管理
  • · 可长距离施工,Leak Point 最少化
  • · 整体施工,施工便利 & 施工费用30% Down
  • · 优秀的耐磨性
  • · 使用温度最高500℉ (260℃)
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    EP COIL TUBE
  • Maker Introduce

Maker

Introduce

  • 提供特殊管道零件和服务
  • 清洁、测试和包装在ISO标准的10级洁净室中进行
  • EP-Coil Tube Evaluation Data

Particle test #1 – 180º Bending → Straight restoration

※ 确认 10 分钟后未检测到粒子（分钟）

Particle test #2 – Roller Use Straight Bending

  • How to install EP-TUBE (COil : Stick) #1

ⓐ Coil Tube 建设（改善计划）

ⓑ Stick Tube (现存的)

  • How to install EP-TUBE (COil : Stick) #2
  • Why use EP-Coil Tube?

SUS 管道焊接

  • – 一种高温热熔化焊条的管对管连接方法
  • – 焊条成分表

Global 企业 EP-Coil 应用

  • – 台积电、Intel、Micron等应用2016年新线

EP-Coil Tube 申请

  • – 减少焊点 = Weak point 减少 → Metal 洗脱 point 减少
  • – 400M 工作时的焊接点
  • 직관기
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    FFKM 氟化物 O-RING
  • Solrez’s selection guide for process
Process Compound Number Service temp(oC) Color Equivalent Compound
Metal CVD Process
LP-CVD
Oxidation
Diffusion
Lamp Anneal
RTP
Ash
ALD		 8318 320 Light yellow 4079,8900
7075UP,653
8107 320 Black 4079,8900
7075UP,653
9578 300 Light yellow 9100, 9300M
XRZ
9575 300 White 8475, 8575
9568 280 Light yellow 8002
9566 280 White E-38
Wet Etching
Photo litho-graypy
Stripping
Copper plating		 9308 250 Light yellow 8002.93
9307 250 Black 6375UP
7709 230 Amver translucent Amor crystal
7708 230 Light yellow Ultic Armor
6907 220 Black -
6607 250 Black Fluoraz888
5901 200 Blue -
  • Solrez’s Compound selection guide
Compound number Service temp(oC) Color Equlvalent Compound Recommend Processing
8318 320 Light yellow 4079,8900,7075UP,653 Oxidation diffusion(02,N2,CI2)
Metal CVD(NF3,SiH4,F2,CI2)
8107 320 Black 4079,8900,7075UP,653 Oxidation diffusion(02,N2,CI2)
Metal CVD(NF3,SiH4,F2,CI2)
9578 300 Light yellow 9100,9300,XRZ PECVD/ALD/HDPCVD
(TMS,SiH4,NH3,NF3,SiF4)
9575 300 White 8475,8575 Infrared light
9568 280 Light yellow 8002 Ash(2,CF4,NH3,CHF3),Dry etch
9566 280 White E-38 Ash(2,CF4,NH3,CHF3),Dry etch
9308 280 Light yellow 8002,9300 Wet etch,strip,copper plating
(HN03,HF,H3PO4,H202,CuSO4)
9307 250 Black 6375UP
7709 230 Amber translucent Amor crystal All CVD,Dry etch and plasma ashing
equipment For semiconductor and LCD
7708 230 Light yellow Ultic Armor
6907 220 Black - Excellent solvent resistance(FKM)
6607 250 Black Fluoraz888 Wet etch
5901 220 Blue - O2,O3 Plasma
  • High temperature FFKM special O-ring
  • Grade: Solrez8318
  • Material: FFKM
  • Service temp: 320℃
  • Color: light yellow
  • Hardness: 75(shore A)
  • Tensile strength: 14.2MPa
  • Elongation: 210%
  • Compression set: 18%(270℃ x 72hrs)
  • Application:
    – Oxidation diffusion(O2,N2,CI2)
    – Metal CVD(NF3,SiH4,F2,CI2)
  • Grade: Solrez8107
  • Material: FFKM
  • Service temp: 320℃
  • Color: Black/li>
  • Hardness: 75(shore A)
  • Tensile strength: 12.2MPa
  • Elongation: 180%
  • Compression set: 18%(200℃ x 72hrs)
  • Application:
    – Oxidation diffusion(O2,N2,CI2)
    – Metal CVD(NF3,SiH4,F2,CI2)

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