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    DUAL CONTAINMENT TUBE
  • Features
  • · Minimal risk factors and eye caring effect with color of installed pipes
  • · Minimize leak points through distant construction
  • · Easy-to-work with & reduced construction cost 30% down
  • · Excellent wear resistance
  • · Maximum operating temperature of 500°F (260℃)
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    EP COIL TUBE
  • Maker Introduce

Maker

Introduce

  • Construction special pipes and providing service
  • ISO-Based Class-10 Clean room washing, testing, and packaging
  • EP-Coil Tube Evaluation Data

Particle test #1 – 180º Bending → Straight restoration

※ Particle not detected after ten minutes (resolves human error within ten minutes as well)

Particle test #2 – Roller Use Straight Bending

  • How to install EP-TUBE (COil : Stick) #1

ⓐ Coil Tube 시공 (개선안)

ⓑ Stick Tube (기존)

  • How to install EP-TUBE (COil : Stick) #2
  • Why use EP-Coil Tube?

SUS Pipe Welding

  • – Connecting pipes with high temperature heat welding
  • – Welding rod chemical composition

Applying the Global Business EP-Coil

  • – Started and applied a new line in 2016 with TSMC, Intel, Micron, and more

Applying the EP-Coil Tube

  • – Fewer welding = Fewer weak points -> fewer metal dissolution points
  • – Amount of welding with 400m at work
  • Bar straightening machine
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    FFKM Fluorine O-RING
  • Solrez’s selection guide for process
Process Compound Number Service temp(oC) Color Equivalent Compound
Metal CVD Process
LP-CVD
Oxidation
Diffusion
Lamp Anneal
RTP
Ash
ALD		 8318 320 Light yellow 4079,8900
7075UP,653
8107 320 Black 4079,8900
7075UP,653
9578 300 Light yellow 9100, 9300M
XRZ
9575 300 White 8475, 8575
9568 280 Light yellow 8002
9566 280 White E-38
Wet Etching
Photo litho-graypy
Stripping
Copper plating		 9308 250 Light yellow 8002.93
9307 250 Black 6375UP
7709 230 Amver translucent Amor crystal
7708 230 Light yellow Ultic Armor
6907 220 Black -
6607 250 Black Fluoraz888
5901 200 Blue -
  • Solrez’s Compound selection guide
Compound number Service temp(oC) Color Equlvalent Compound Recommend Processing
8318 320 Light yellow 4079,8900,7075UP,653 Oxidation diffusion(02,N2,CI2)
Metal CVD(NF3,SiH4,F2,CI2)
8107 320 Black 4079,8900,7075UP,653 Oxidation diffusion(02,N2,CI2)
Metal CVD(NF3,SiH4,F2,CI2)
9578 300 Light yellow 9100,9300,XRZ PECVD/ALD/HDPCVD
(TMS,SiH4,NH3,NF3,SiF4)
9575 300 White 8475,8575 Infrared light
9568 280 Light yellow 8002 Ash(2,CF4,NH3,CHF3),Dry etch
9566 280 White E-38 Ash(2,CF4,NH3,CHF3),Dry etch
9308 280 Light yellow 8002,9300 Wet etch,strip,copper plating
(HN03,HF,H3PO4,H202,CuSO4)
9307 250 Black 6375UP
7709 230 Amber translucent Amor crystal All CVD,Dry etch and plasma ashing
equipment For semiconductor and LCD
7708 230 Light yellow Ultic Armor
6907 220 Black - Excellent solvent resistance(FKM)
6607 250 Black Fluoraz888 Wet etch
5901 220 Blue - O2,O3 Plasma
  • High temperature FFKM special O-ring
  • Grade: Solrez8318
  • Material: FFKM
  • Service temp: 320℃
  • Color: light yellow
  • Hardness: 75(shore A)
  • Tensile strength: 14.2MPa
  • Elongation: 210%
  • Compression set: 18%(270℃ x 72hrs)
  • Application:
    – Oxidation diffusion(O2,N2,CI2)
    – Metal CVD(NF3,SiH4,F2,CI2)
  • Grade: Solrez8107
  • Material: FFKM
  • Service temp: 320℃
  • Color: Black/li>
  • Hardness: 75(shore A)
  • Tensile strength: 12.2MPa
  • Elongation: 180%
  • Compression set: 18%(200℃ x 72hrs)
  • Application:
    – Oxidation diffusion(O2,N2,CI2)
    – Metal CVD(NF3,SiH4,F2,CI2)

You can view the entire CSP WET equipments.